Absolute UV and VUV emission in the 110400nm region from 13.56MHz driven hollow slot microplasmas operating in open air
Identifieur interne : 001695 ( Main/Exploration ); précédent : 001694; suivant : 001696Absolute UV and VUV emission in the 110400nm region from 13.56MHz driven hollow slot microplasmas operating in open air
Auteurs : A. Rahman [États-Unis] ; A P Yalin [États-Unis] ; V. Surla [États-Unis] ; O. Stan [États-Unis] ; K. Hoshimiya [États-Unis] ; Z. Yu [États-Unis] ; Eric Littlefield [États-Unis] ; G J Collins [États-Unis]Source :
- Plasma Sources Science and Technology [ 0963-0252 ] ; 2004.
English descriptors
- Teeft :
- Absolute emission, Absolute intensity, Active discharge, Active discharge region, Active plasma, Active plasma region, Admixture, Afterglow, Afterglow plume, Ambient, Ambient nitrogen, Ambient species, Appl, Argon, Argon dimer, Argon dimers, Argon metastables, Argon plasmas, Argon source, Atmospheric pressure, Atomic hydrogen, Atomic lines, Atomic nitrogen, Atomic nitrogen lines, Atomic oxygen, Atomic oxygen line, Cathode discharges, Chem, Colorado state university, Commercial mercury lamps, Concentration decreases, Continuum emission, Current density, Current work, Detection system, Electrical power, Electrode, Electron impact, Electron impact excitation, Electronic version, Emission spectra, Energy levels, Excitation, External plume, Fort collins, Gure, Gures, Helium metastables, Helium plasmas, Hollow slot, Hollow slot microplasma, Hollow slot microplasmas, Horizontal axis, Hydrogen addition, Hydrogen admixtures, Impurity lines, Largest peaks, Lett, Light emission, Light production, Lyman line, Main contributions, Mercury lamps, Metastable, Metastable density, Metastables, Microelectrode device, Microelectrodes, Microhollow cathode discharges appl, Microplasma, Microplasmas, Molecular hydrogen, Molecular nitrogen, Molecular nitrogen ions, Molecular transitions, Negative system, Nitrogen line, Nonequilibrium discharges, Open slot, Open slot electrodes, Open slots, Optical diagnostics, Optical emission, Optical emission spectra, Optical output, Optical power, Optical spectra, Peak intensities, Phys, Plasma, Plasma plume, Plasma sources, Plasma species, Plume, Plume region, Power density, Processing applications, Quenching, Quenching reactions, Rate constants, Region representative, Rotational, Rotational temperature, Sccm, Slit function, Slot, Slot electrodes, Slot length, Slot microelectrodes, Slot microplasma, Slot plasma, Slow electrons, Slpm, Small admixtures, Species wavelength, Spectral lines, Spectral region, Spectral scans, Strong lines, Technol, Unit area, Unit length, Upper state, Vertical axis, Vibrational, Vibrational levels, Wavelength region, Weak continuum, Work pieces.
Abstract
We present absolute optical emission spectra in the 110400nm regions from radio-frequency-driven (13.56MHz) hollow slot microplasmas operating in open air at atmospheric pressure. The term microplasma in our research refers to inter-electrode separation (100600m) only, as electrode lengths are scalable from 1 to 30cm. This creates an extended slot plasma and an associated afterglow plume as described herein. Spectra are presented for gas flows through the microelectrodes of argon and helium with small admixtures of hydrogen and nitrogen into open air. The spectra are discussed in terms of species origin and magnitude of the dominant emission lines. Atomic O and N lines dominate the 110200nm region, whereas, in the 200400nm region, NO, N2, and NH molecular lines are strongest. The role of the state in the open air microplasmas is discussed and the second positive system of molecular nitrogen (N2(C 3gB 3g)), is used to measure the rotational (gas) temperature. Finally, we compare the efficiency and magnitude of light emission from the open air microplasmas with values attainable from commercial sealed mercury lamps in the UVB and UVC regions.
Url:
DOI: 10.1088/0963-0252/13/3/021
Affiliations:
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Hoshimiya</name><affiliation wicri:level="2"><country xml:lang="fr">États-Unis</country><wicri:regionArea>Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523</wicri:regionArea><placeName><region type="state">Colorado</region></placeName></affiliation></author><author><name sortKey="Yu, Z" sort="Yu, Z" uniqKey="Yu Z" first="Z" last="Yu">Z. Yu</name><affiliation wicri:level="2"><country xml:lang="fr">États-Unis</country><wicri:regionArea>Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523</wicri:regionArea><placeName><region type="state">Colorado</region></placeName></affiliation></author><author><name sortKey="Littlefield, Eric" sort="Littlefield, Eric" uniqKey="Littlefield E" first="Eric" last="Littlefield">Eric Littlefield</name><affiliation wicri:level="2"><country xml:lang="fr">États-Unis</country><wicri:regionArea>Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523</wicri:regionArea><placeName><region type="state">Colorado</region></placeName></affiliation></author><author><name sortKey="Collins, G J" sort="Collins, G J" uniqKey="Collins G" first="G J" last="Collins">G J Collins</name><affiliation wicri:level="2"><country xml:lang="fr">États-Unis</country><wicri:regionArea>Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523</wicri:regionArea><placeName><region type="state">Colorado</region></placeName></affiliation></author></analytic><monogr></monogr><series><title level="j">Plasma Sources Science and Technology</title><title level="j" type="abbrev">Plasma Sources Sci. Technol.</title><idno type="ISSN">0963-0252</idno><idno type="eISSN">1361-6595</idno><imprint><publisher>Institute of Physics Publishing</publisher><date type="published" when="2004">2004</date><biblScope unit="volume">13</biblScope><biblScope unit="issue">3</biblScope><biblScope unit="page" from="537">537</biblScope><biblScope unit="page" to="547">547</biblScope><biblScope unit="production">Printed in the UK</biblScope></imprint><idno type="ISSN">0963-0252</idno></series></biblStruct></sourceDesc><seriesStmt><idno type="ISSN">0963-0252</idno></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="Teeft" xml:lang="en"><term>Absolute emission</term><term>Absolute intensity</term><term>Active discharge</term><term>Active discharge region</term><term>Active plasma</term><term>Active plasma region</term><term>Admixture</term><term>Afterglow</term><term>Afterglow plume</term><term>Ambient</term><term>Ambient nitrogen</term><term>Ambient species</term><term>Appl</term><term>Argon</term><term>Argon dimer</term><term>Argon dimers</term><term>Argon metastables</term><term>Argon plasmas</term><term>Argon source</term><term>Atmospheric pressure</term><term>Atomic hydrogen</term><term>Atomic lines</term><term>Atomic nitrogen</term><term>Atomic nitrogen lines</term><term>Atomic oxygen</term><term>Atomic oxygen line</term><term>Cathode discharges</term><term>Chem</term><term>Colorado state university</term><term>Commercial mercury lamps</term><term>Concentration decreases</term><term>Continuum emission</term><term>Current density</term><term>Current work</term><term>Detection system</term><term>Electrical power</term><term>Electrode</term><term>Electron impact</term><term>Electron impact excitation</term><term>Electronic version</term><term>Emission spectra</term><term>Energy levels</term><term>Excitation</term><term>External plume</term><term>Fort collins</term><term>Gure</term><term>Gures</term><term>Helium metastables</term><term>Helium plasmas</term><term>Hollow slot</term><term>Hollow slot microplasma</term><term>Hollow slot microplasmas</term><term>Horizontal axis</term><term>Hydrogen addition</term><term>Hydrogen admixtures</term><term>Impurity lines</term><term>Largest peaks</term><term>Lett</term><term>Light emission</term><term>Light production</term><term>Lyman line</term><term>Main contributions</term><term>Mercury lamps</term><term>Metastable</term><term>Metastable density</term><term>Metastables</term><term>Microelectrode device</term><term>Microelectrodes</term><term>Microhollow cathode discharges appl</term><term>Microplasma</term><term>Microplasmas</term><term>Molecular hydrogen</term><term>Molecular nitrogen</term><term>Molecular nitrogen ions</term><term>Molecular transitions</term><term>Negative system</term><term>Nitrogen line</term><term>Nonequilibrium discharges</term><term>Open slot</term><term>Open slot electrodes</term><term>Open slots</term><term>Optical diagnostics</term><term>Optical emission</term><term>Optical emission spectra</term><term>Optical output</term><term>Optical power</term><term>Optical spectra</term><term>Peak intensities</term><term>Phys</term><term>Plasma</term><term>Plasma plume</term><term>Plasma sources</term><term>Plasma species</term><term>Plume</term><term>Plume region</term><term>Power density</term><term>Processing applications</term><term>Quenching</term><term>Quenching reactions</term><term>Rate constants</term><term>Region representative</term><term>Rotational</term><term>Rotational temperature</term><term>Sccm</term><term>Slit function</term><term>Slot</term><term>Slot electrodes</term><term>Slot length</term><term>Slot microelectrodes</term><term>Slot microplasma</term><term>Slot plasma</term><term>Slow electrons</term><term>Slpm</term><term>Small admixtures</term><term>Species wavelength</term><term>Spectral lines</term><term>Spectral region</term><term>Spectral scans</term><term>Strong lines</term><term>Technol</term><term>Unit area</term><term>Unit length</term><term>Upper state</term><term>Vertical axis</term><term>Vibrational</term><term>Vibrational levels</term><term>Wavelength region</term><term>Weak continuum</term><term>Work pieces</term></keywords></textClass><langUsage><language ident="en">en</language></langUsage></profileDesc></teiHeader><front><div type="abstract">We present absolute optical emission spectra in the 110400nm regions from radio-frequency-driven (13.56MHz) hollow slot microplasmas operating in open air at atmospheric pressure. The term microplasma in our research refers to inter-electrode separation (100600m) only, as electrode lengths are scalable from 1 to 30cm. This creates an extended slot plasma and an associated afterglow plume as described herein. Spectra are presented for gas flows through the microelectrodes of argon and helium with small admixtures of hydrogen and nitrogen into open air. The spectra are discussed in terms of species origin and magnitude of the dominant emission lines. Atomic O and N lines dominate the 110200nm region, whereas, in the 200400nm region, NO, N2, and NH molecular lines are strongest. The role of the state in the open air microplasmas is discussed and the second positive system of molecular nitrogen (N2(C 3gB 3g)), is used to measure the rotational (gas) temperature. Finally, we compare the efficiency and magnitude of light emission from the open air microplasmas with values attainable from commercial sealed mercury lamps in the UVB and UVC regions.</div></front></TEI><affiliations><list><country><li>États-Unis</li></country><region><li>Colorado</li></region></list><tree><country name="États-Unis"><region name="Colorado"><name sortKey="Rahman, A" sort="Rahman, A" uniqKey="Rahman A" first="A" last="Rahman">A. Rahman</name></region><name sortKey="Collins, G J" sort="Collins, G J" uniqKey="Collins G" first="G J" last="Collins">G J Collins</name><name sortKey="Hoshimiya, K" sort="Hoshimiya, K" uniqKey="Hoshimiya K" first="K" last="Hoshimiya">K. Hoshimiya</name><name sortKey="Littlefield, Eric" sort="Littlefield, Eric" uniqKey="Littlefield E" first="Eric" last="Littlefield">Eric Littlefield</name><name sortKey="Stan, O" sort="Stan, O" uniqKey="Stan O" first="O" last="Stan">O. Stan</name><name sortKey="Surla, V" sort="Surla, V" uniqKey="Surla V" first="V" last="Surla">V. Surla</name><name sortKey="Yalin, A P" sort="Yalin, A P" uniqKey="Yalin A" first="A P" last="Yalin">A P Yalin</name><name sortKey="Yalin, A P" sort="Yalin, A P" uniqKey="Yalin A" first="A P" last="Yalin">A P Yalin</name><name sortKey="Yu, Z" sort="Yu, Z" uniqKey="Yu Z" first="Z" last="Yu">Z. Yu</name></country></tree></affiliations></record>Pour manipuler ce document sous Unix (Dilib)
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